Active vibration isolation unit - List of Manufacturers, Suppliers, Companies and Products

Active vibration isolation unit Product List

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Active Vibration Isolation Unit "VAAV-H"

Active Vibration Isolation Unit "VAAV-H"

Achieving slim design with the same performance as conventional products! Pneumatic active vibration isolation unit.

The active vibration isolation unit "VAAV-H" is equipped with a dedicated ultra-sensitive accelerometer for VAAV. It accurately detects extremely small vibrations. Using a unique active vibration isolation algorithm, it performs high-speed calculations and instantly cancels out vibrations with a high-precision, high-output actuator. Additionally, ultra-sensitive accelerometers are generously deployed on the floor side, achieving world-class vibration isolation performance through feedforward control. 【Features】 ○ Maintains the same performance as the VAAV-A series while keeping the overall height of the device low. ○ High-precision control of displacement and position in all directions is possible through pneumatic control. ○ Capable of selecting high-flow valves with fast response to accommodate large moving loads. ○ Safe and secure design compliant with CE marking (Controller SAC-07). ○ Standard features include stage feedforward functionality and vibration waveform display analysis software. For more details, please contact us or download the catalog.

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Technical Document "What is Vibration Isolation... Overview of Passive Vibration Isolation Tables"

Technical Document "What is Vibration Isolation... Overview of Passive Vibration Isolation Tables"

This document introduces the types of vibration isolation tables, their main components, examples of their configurations, and examples of their characteristics.

= Content = 1. Vibration isolation effect of the vibration isolation table 2. Shock response of the vibration isolation table 3. Types and performance of vibration-damping materials 3-1 Comparison of characteristics by type of vibration-damping material 3-2 Air spring (bellows type) 3-3 Air spring (diaphragm type) 3-4 Coil spring type 3-5 Vibration-damping rubber type 4. Automatic level adjuster 5. Measurement of vibration isolation effect For more details, please contact us or download the catalog.

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[Example] Active Vibration Isolation Measures for LCD Substrate Inspection Equipment

[Example] Active Vibration Isolation Measures for LCD Substrate Inspection Equipment

Measures taken with the air servo active vibration isolation system! A good vibration environment has been established across all frequency ranges.

We would like to introduce a case study on active vibration isolation measures for liquid crystal substrate inspection equipment. During the installation of a large liquid crystal substrate inspection device (length measuring machine), a preliminary survey of the vibration environment of the installation floor revealed that it exceeded the allowable limits. This length measuring machine observes the line width of patterns optically and is sensitive to the vibration environment, so we implemented measures using an air servo active vibration isolation device. After the active vibration isolation measures were taken, we cleared the vibration allowable limits of the device and were able to establish a good vibration environment across all frequency ranges. [Case Summary] ■ Issue: A preliminary survey of the vibration environment of the installation floor for a large liquid crystal substrate inspection device (length measuring machine) revealed that it exceeded the allowable limits. ■ Measures: Installation of an air servo active vibration isolation device. ■ Effect: Cleared the vibration allowable limits of the device and established a good vibration environment across all frequency ranges. *For more details, please refer to the PDF document or feel free to contact us.

  • Monitoring and Control Equipment
  • Earthquake-proof and vibration-damping equipment

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